ST Series Power Supply Instruction Manual INTRODUCTION
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1 INTRODUCTION
This user manual contains important information about the installation, functionality,
start-up and operations of the Telemark ST Series High Voltage Electron Beam Power
Supply. Read this manual carefully to ensure correct installation and operating
conditions are met for its intended use.
1.1 INTENDED PURPOSE
The Telemark ST High Voltage Electron Beam Power Supply is a constant voltage, high
frequency, switching power supply intended to deliver power to a single Electron Beam
(EB) source which uses electro-magnetic deflection or a combination of permanent
magnet and electro-magnetic focusing.
Typically, it is used with other Telemark Electron Beam equipment such as an Electron
Beam Sweep Generator, a Crucible Indexer, and/or a Deposition Process Controller or
the user’s PLC system. The Telemark ST High Voltage Electron Beam Power Supply
delivers up to -10kV (-8kV for ST-4) voltage output with a maximum emission current
depending on model specifications and configuration. (See chapter 2.3 and Figure 2-6,
ST Electrical Specifications for more info.)
The Telemark ST High Voltage Electron Beam Power Supply will be referred to as the
ST Power Supply for the remainder of this manual.
1.2 USER RESPONSIBILITY
The user is responsible for proper operation and ordinary maintenance of the
equipment, following procedures described in this manual, including reference
documents. Proper operation includes timely replacement of parts that are missing,
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