Telemark ST Series - Connecting the St Power Supply

ST Series Power Supply Instruction Manual INSTALLATION
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There are also 4 ground connections to be maintained between the rack-installed
instruments and the HVPS but not directly to chamber ground:
1. ST-Controller - connected using 14 AWG gauge (2.5mm
2
) wire.
2. Sweep controller - connected using 14 AWG gauge (2.5mm
2
) wire.
3. Indexer controller - connected using 14 AWG gauge (2.5mm
2
) wire.
4. Deposition Controller – connected using 14 AWG gauge (2.5mm
2
) wire.
These connections can either be “daisy-chained” from one unit to the next and then to
the HVPS chassis ground or maintain their own individual connections to the HVPS
chassis ground.
There is not a required order for the above. Ensure connections are secure prior to
turning on the power to the E-beam. Operating without one or more grounds properly
connected may cause damage to equipment or even harm to the operator.
3.4 CONNECTING THE ST POWER SUPPLY
Here we will discuss the interconnections between the High Voltage Power Supply
(HVPS), the Filament Output Transformer, The ST Controller, and Input Power.