Telemark ST Series - Figure 3-4, Suggested Grounding Connections

ST Series Power Supply Instruction Manual INSTALLATION
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Figure 3-4, Suggested Grounding Connections
Distance Between E-Beam
Chamber and Grounding Point
Minimum Recommended Strap/Cable
< 10 Feet « 3 meters)
#6 Gauge (16mm
2
) or larger copper cable
10-20 Feet (3-6 meters)
#4 Gauge (25mm
2
) or larger copper cable
20-60 Feet (6-18 meters)
2-inch x .035 inch (50mm x 1mm) thick copper strap
> 60 Feet (> 18 meters)
Contact Telemark for recommendations
In addition to the critical building (Earth) ground described above, there are 3 other
ground leads that will be attached to the ground bar on the E-beam chamber:
1. Filament Output Transformer - connected using 14 AWG gauge (2.5mm
2
) wire
2. Safety cover over high voltage feedthroughs - connected using 12 AWG gauge
(4mm
2
) wire
3. E-beam power supply - connected using 6 AWG (16mm
2
) wire
Filament
Transformer
6 AWG is for distances up to 10 feet (3 meters)
for longer distances see table below
6 AWG
(16mm )
2
Power Supply
14 AWG
(2.5mm )
2
CHAMBER
RETURN
CHAMBER
GROUND
All Wire Sizes Are Minimum
Sweep
Deposition
Controller
Power Supply
Controller
Indexer
Rack
14 AWG
(2.5mm )
2