ST Series Power Supply Instruction Manual INTRODUCTION
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broken or plainly worn. If the user has a reasonable doubt about understanding the use
or installation of a component, Telemark Service should be contacted.
It is vitally important that the user properly install the equipment as described in Chapter
3 (Installation) of this manual.
The warranty will be void if the equipment is improperly installed and/or
improperly grounded.
Alteration of the design or any function of the equipment will void the warranty and is
entirely the responsibility of the user.
1.3 SYSTEM DESCRIPTION
The ST Power Supply is comprised of three main units: The High Voltage Power
Supply, the Filament Output Transformer, and the ST Controller.
1.3.1 The High Voltage Power Supply
The High Voltage Power Supply (usually abbreviated HVPS) produces the High Voltage
and Filament Current outputs. It also controls the power and regulation of these outputs
for use in Electron Beam deposition applications. It receives the control values from the
ST Controller and produces the desired outputs to be joined at the Filament Output
Transformer for use with the Electron Beam source emitter assembly.
1.3.2 The Filament Output Transformer
The Filament Output Transformer (usually abbreviated FOT) uses the line voltage
filament control output and steps down the voltage to increase the output current for use
with the emitter assembly filament. It also joins the negative polarized High Voltage DC
output of the ST Power Supply to the high current output of the Filament Output
Transformer and sends the combined outputs through High Voltage Feed-throughs
mounted in the chamber wall to the Electron Beam source emitter to produce the
desired emission rate.
1.3.3 The ST Controller
The ST Controller serves as an interface for the common modes of operation of the ST
Power Supply. It converts the inputs from one of three separate input modes (Local,
Handheld, and Remote) and sends that information to the High Voltage Power Supply
to produce the desired outputs.
1.3.4 The Handheld Controller (Optional)
The Handheld controller offers more freedom of movement while controlling the ST
Power Supply output. The Handheld Controller allows the user to view the source