Content
Agilent 5110/5100 ICP-OES Service Manual Agilent Restricted 5
Circuit breaker and power socket 88
RF System 89
RF Oscillator 89
RF Current Sensor 95
Igniter 96
SSRF Filter board 97
SSRF Control board 98
RF Power Supply (RFPS) 98
SSRF PSU interface board 99
RFPS cradle 99
Air Cooling 101
Air cooling filter 101
Cooling fan 101
Air cooling flow sensor 102
Plasma interlocks and sensors 103
RF Door interlock switches 103
Plasma sensor 104
RF1 (SSRF exhaust) temperature sensor 105
RF2 (Plasma exhaust) temperature sensor 105
Gas System 106
Gas control module 106
Gas Option 108
Gas Filter 109
Water system 111
Water control module 111
SSRF water inlet temperature sensor 112
Water filter 113
Optics System 114
Pre Optics System 114
Axial window 115
Radial window 116
Mirror axial M1 117
Mirror axial M2 118
Mirror axial M3 119
Mirror radial M1 120
Viewing height motor 120
Mirror radial M2 121
Beam combiner and PCA board 122
Thermal stabilizer 123
Polychromator 126
Polychromator access 127
Collimator and Focus mirror access 129
Pilot mirror M5 129