Installation 2
Hardware Installation 35
7 Let the lines purge into a fume hood for 5 to 10 minutes.
8 Connect the other end of the tubing to the Gas A fitting on the flow module
as shown in Figure 7.
9 If another reagent gas is to be used, use more stainless steel tubing to
connect it to the Gas B fitting.
If you are going to connect isobutane, you will need another gas purifier for
the Gas B line. Observe the manufacturer’s suggested pressure settings.
CAUTION
Do not connect isobutane without a gas purifier. Do not use the gas purifier with
ammonia.
Figure 7 Connecting the methane line
Gas B (alternate
reagent gas) line
Gas A (methane) line
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