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5. Machine Leveling
② Repeat the leveling operation as described above and write down the level amount
on a piece of paper.
How to record the level on a piece of paper (example)
※ In case of the table above, as the right hand side is 30μm higher, draw an arrow
heading to the right hand side and write down
‘30’ and do the same for other
two positions. Then, the level value shall be determined to be a value calculated
by subtracting the smallest number from the biggest number from among the
3) Finishing Leveling Operation
① Checking the machine precision prior to finishing the leveling operation
If the level value meets the target, measure the machine static precision before
tightening the anchor nut and make a correction using the level if there is any
problem with the precision. (
Refer to “Machine Precision Measurement and
Adjustment
”)
② Rechecking the Level
Even when the level bolt was touched slightly, check the machine absolute level and
feed level again and perform re-leveling operation in case of any problem.
※ Note) Matters to be noted when reading the level value
There is some distance between the level instrument
’s scale plate and
the droplet tube and, therefore, numbers read may be different
depending on the viewing angle. When reading the level scale, make
sure that the eyes make a right angle with the level.
Y-direction: 20
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