Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 89
5
SERIAL COMMUNICATION PROTOCOL
Error message
Value
Error message
Value
Ram error
0
DSP->PCB Com Fail
33
Eeprom Error
1
PCB->DSP Com Fail
34
TMS Higher Temp
2
TMS Sensor Lost
35
TMS Breaker Trip
3
Tuning Error 1
36
TMS Overheat
4
Tuning Error 2
37
Mains Failure
5
Tuning Error 3
38
Power Supply Failure
6
Tuning Error 4
39
Overspeed 1
7
Tuning Error 5
40
Driver Overvoltage
8
ATMP Failure
41
CAUTION: CNT heat 1
9
*1
RTMP Failure
42
CNT Overheat 1
10
Imbalance X_H
43
*1
Driver Overcurrent
11
Imbalance X_B
44
*1
Driver Overload
12
Imbalance Z
45
*1
Disturbance X_H
13
Tuning Error 6
46
Disturbance Y_H
14
Tuning Error 7
47
Disturbance X_B
15
Tuning Error 8
48
Disturbance Y_B
16
Tuning Error 9
49
Disturbance Z
17
Driver Failure
50
Motor Overheat
18
R-Unit Failure
51
CAUTION: CNT Heat 2
19
*1
Motor Resistor Lost
52
CNT Overheat 2
20
Driver PWM Trouble
53
T.Cable Disconnected
21
Driver FAN Failure
54
P.Cable Disconnected
22
Driver CPU Error
55
E.Valve Disconnect
23
R-Unit Com. Failure
56
Driver Com. Failure
24
Amp Overcurrent
57
First Damage Limit
25
*1
DSP Initialize Fail
58
Second Damage Limit
26
Accel Malfunction
59
START NOT ALLOWED
27
Pump Record Failure
60
Speed Pulse Lost
28
PCB Record Failure
61
Overspeed 2
29
Tuning Error 10
62
Overspeed 3
30
Tuning Error 11
63
M_Temp Sensor Lost
31
Tuning Error 12
64
TMS Lower temp
32
Tuning Error 13
65
Table 23 - Error message values