Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 60
4
OPERATION
4.7.4 Temperature control
When the temperature of the STP pump heating-cooling part is lower than the setting value, the TMS
heater is turned "ON", and the TMS valve is turned "OFF" to heat the STP pump. When the
temperature of the STP pump heating-cooling part is higher than the setting value, the TMS heater is
turned "OFF", and the TMS valve is turned "ON" to cool the STP pump. The LCD displays the current
temperature of the STP pump heating-cooling part as shown in Table 15.
TMS Function setting
Temperature display on lower LCD
“DISABLE”
No indication
“ENABLE”
The temperature sensor measurement value connected to the
built-in TMS circuit is displayed as "TMS TEMP: ## °C".
Example:
“External”
“Advanced”
Multiple temperature sensor measurement values along with
the set sensor name are displayed. The sensor can be selected
to display with the UP / DOWN switch.
The name of the temperature sensor connected to the built-in
TMS circuit is "TMS sensor".
In addition, the temperature sensor measurement value that is
not controlled is displayed as "--- °C".
Example:
Temperature sensor name "Heat ring", measured value
"147 °C". As the value is within the set control temperature
range, "@" mark is displayed.
Table 15 - TMS Function setting value and indication
Heat ring :@ 147 ⁰C
TMS TEMP : 60 ⁰C