Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 102
5
SERIAL COMMUNICATION PROTOCOL
5.4.15 ReadMeasValue
Function: Reads the TMS temperature, motor temperature and measured rotational speed. The motor
temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed
value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
Transmission frame:
*1
PC->SIM
Stx
0
0
1
?
[
Etx
LRC
SIM->PC
Ack
PC->SIM
*1
Ack
SIM->PC
Stx
0
0
1
Sp
[
Parameter 1 to 6
Etx
LRC
*1 The HEX code of ASCII character ’[’ is "5B".
Parameter
Item
Data format
Remark
1
[System reservation]
120-bits hexadecimal
coded ASCII
2
TMS temperature (Unit ºC)
16-bits hexadecimal coded
ASCII
3
Motor temperature (Unit ºC)
16-bits hexadecimal coded
ASCII
4
[System reservation]
40-bits hexadecimal coded
ASCII
5
Measured rotational speed (Unit: Hz)
16-bits hexadecimal coded
ASCII
6
[System reservation]
64-bits hexadecimal coded
ASCII