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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 130
8
MAINTENANCE
8.8 Maintenance and inspection
WARNING
Before carrying out any maintenance or inspections on the STP pump and/or the
SCU-801, power off the primary power (turn the MAIN POWER "OFF"), confirm that
the LED and LCD are extinguished, and isolate (Lockout/Tagout) the electrical
energy source, water and gas, and other energy sources on the vacuum equipment.
Failure to do so may result in the inadvertent rotation of the STP pump which may
result in an accident, an electric shock or damage to equipment. Moreover, an
accident caused by water leaks or gas leak may occur.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric shock
or the failure.
CAUTION
DO NOT touch any place other those specified when performing maintenance or inspecting the pump
and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments such as a baking heater before performing maintenance and
inspections.
Only Edwards will replace the maintenance parts and will execute repair and overhaul. Contact Service
office.

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