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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 7
1
INTRODUCTION
1.6 General description
The SCU-801 is the control unit required to drive the STP series of turbomolecular pumps. The
SCU-801 converts the single-phase line supply voltage into a 3-phase d.c. voltage to drive the pump
motor. It also evaluates measured signals and performs the following functions:
It provides logic to control the pump functions.
It operates the magnetic bearing system.
It operates the optional Temperature Management System (TMS).
Figure 7 - SCU-801 control unit
The following series of turbomolecular pumps can be used in conjunction with the SCU-801.
Model Name
Specification
STP-603/1003 series
Ultra-high vacuum type
STP-H301/H451 series
High-throughput type
STP-H803/H1303 series
High-throughput type
STP-A803/A1303 series
Advanced high-throughput type
STP-A1603 series
Advanced high-throughput type
Table 1 - Turbomolecular pumps

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