Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 33
3
INSTALLATION
3.11 Parameter set mode
Parameter set mode is used to set the different parameters of the STP pump and SCU-801.
3.11.1 Remote operation setting
The remote parallel port (I/O REMOTE), serial port COM1, serial port COM2, and STP-Link are fitted
on the SCU-801 as standard connectors for the remote operation. The hardware is selected for the
remote operation setting of the start, stop and reset. Refer to Section 4.5, Section 5 and Section 5 for
the remote operating methods. The remote output monitoring the operating state can be output with
any hardware.
3.11.2 Rotational speed setting
The rotational speed can be changed in units of 500 rpm in the NORMAL state. The variable range is
from half of the rated speed to the rated speed. The rated speed is different according to the connected
pump.
3.11.3 TMS setting
Configures TMS control function (ENABLE/External/Advanced/DISABLE).
When the TMS control function is set to "ENABLE" or "Advanced", the setting of the pump air-cooling
fan output is disabled automatically. "External" and "Advanced" are used only when using STC-U to
increase the number of sensors, heaters, and valves.
TMS function setting
Built-in TMS unit
External TMS unit
DISABLE
Doesn’t work
Doesn’t work
ENABLE
Works
Doesn’t work
External
Doesn’t work
Works
Advanced
Works
Works
3.11.4 Rotational inhibit signal setting
Enable/Disable the rotation inhibit signal.
3.11.5 Emergency vent valve setting
Enable/Disable the emergency vent valve function. When a failure of the magnetic bearing is detected,
in the state of effective, 24 DCV is output between the TMS connector X5-19 pin and 20 pin. Disable
the function when the emergency vent valve is not fitted on the STP pump connected to the SCU-801.