Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 45
3
INSTALLATION
Levitation NORM:*****rpm
Manual Operation
TMS Heater OFF
Manual Operation
TMS Heater ON
SELECT
UP DOWN
SELECT
ENTER
UP
DOWN
DOWN
＋
Manual Operation
TMS WaterValve Close
Manual Operation
TMS WaterValve Open
UP
DOWN
Manual Operation
Cooling Fan OFF
Manual Operation
Cooling Fan On
UP
DOWN
SELECT
SELECT
SELECT
Manual Operation
undef_OD1 None
SELECT
Manual Operation
undef_OD2 None
SELECT
Manual Operation
undef_OD3 None
SELECT
A
B
C
D
E
F
G
H
Manual Operation
Leak Valve Close
Manual Operation
Leak Valve Open
UP
DOWN
Manual Operation
undef_OD4 None
SELECT
I
Figure 30 - Manual operation method
A.
Operation mode
F.
Output Device 1(undefined)
B.
TMS heater
G.
Output Device 2(undefined)
C.
TMS water valve
H.
Output Device 3(undefined)
D.
Air-cooling fan
I.
Output Device 4(undefined)
E.
Emergency vent valve