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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 107
7
EDCENTRA
7 EdCentra
EdCentra is a centralized monitoring system for a variety of Edwards vacuum and pressure reducing
equipment commonly used in the semiconductor, solar and FPD manufacturing industries.
Telemetry information from individual equipment is collected centrally and electronically, monitoring
and analysing the equipment and presented to the user in the form of web pages.
If you want more information about EdCentra, contact the service office.

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