Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 16
3
INSTALLATION
3.3 Rear panel
1
AC POWER X2
6
P.CONNECTOR X1
2
MAIN POWER breaker
7
Serial port COM1 X3A, X3B
3
Ground terminal
8
TMS X5
4
Serial port COM2 X6
9
EdCentra X9
5
REMOTE X7
Figure 11 - SCU-801 rear panel
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign
. DO NOT touch the terminal. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the SCU-801
(turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy
source, water and gas, and other energy sources on the vacuum equipment.
Item
Description
Function
1
AC POWER X2
Main power connection (240 Va.c. maximum)
2
MAIN POWER breaker
Input power switch
3
Ground terminal
Ground (Earth) connection terminal
4
Serial Port COM2 X6
Serial communication connection RS485
5
REMOTE X7
Remote connection (30 Vd.c. maximum)
6
P.CONNECTOR X1
STP pump connection (92 Va.c. maximum)
7
Serial Port COM1 X3A/X3B
Serial communication connection RS232/RS485 (shard use)
8
TMS X5
TMS unit connection (240 Va.c. maximum)
9
EdCentra X9
EdCentra connection
Table 4 - SCU-801 rear panel connection
1
2
3
5
8
7
4
9
6