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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 114
8
MAINTENANCE
8.3 "WARNING" message description
8.3.1 Damage point function
Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air
from outside or in the event of power failure, can damage the touch-down bearings. The SCU-801
monitors these impacts and assigns damage points to the event of "Disturbance" or "Mains Failure".
The damage point increases with the rotational speed up to 15 point for each "Disturbance", and 1
point for each touch-down at "Mains Failure", ”Inordinate Current”, ”AMB Overcurrent”, ”AMB Ctrl
Lost”, ”Aberrant Accel”, ”Aberrant Brake”.
Refer to Section 3.10, "Confirmation mode" about confirmation method of damage point.
STP pump
Warning message
First Damage Limit
Second Damage Limit
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
120 or more
150 or more
Table 31 - Accumulated damage point and warning message
8.3.2 First damage limit
"First Damage Limit" is displayed when the accumulation point attains the setting value shown in Table
31. The rotating operation can be performed though "WARNING" message is displayed. It is
recommended to have the STP pump overhauled as soon as possible.
8.3.3 Second damage limit
"Second Damage Limit" is displayed when continuing to operate the STP pump after "First Damage
Limit" is displayed and the accumulation of the damage point attains the setting value by further
"Disturbance" and "Mains Failure".
Overhaul the STP pump because the STP pump cannot perform the rotational operation when
"Second Damage Limit" is displayed.
When operating the STP pump is needed after "Second Damage Limit" is displayed, disable the
"Second Damage Limit". The rotating operation can be performed even though the "WARNING"
message is displayed. Refer to Section 3.11 for the setting method.

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