Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-801 and STP pump:
• STP connection cable - STP pump to SCU-801.
• TMS cable - STP pump to built-in TMS unit in the SCU-801.
• Power cable - SCU-801 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-801. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
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SCU-801 control unit
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TMS valve cable
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STP connection cable
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TMS connection cable
3
TMS sensor cable
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Power cable
4
TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
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