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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 44
3
INSTALLATION
3.12 Manual operation mode
The operation of the TMS heater, TMS water valve, pump air-cooling fan, and the emergency vent
valve can be inspected in manual operation mode. However, the manual operation cannot be
performed in the remote operation or using different TMS voltage.
1. Press the "DOWN" and "SELECT" switches simultaneously to enter Manual Mode, then "Manual
Operation TMS Heater OFF" is displayed.
2. Press "UP" switch to display "TMS Heater ON", and the TMS Heater output turns "ON".
Press "DOWN" switch to display "TMS Heater OFF", and the TMS Heater output turns "OFF".
3. Press "SELECT" switch to display "TMS Water Valve Close", and the TMS water valve can be
operated manually with "UP" and "DOWN" switches.
4. Press "SELECT" switch to display "Cooling Fan OFF", and the Air-cooling Fan can be operated
manually with "UP" and "DOWN" switches.
5. Press "SELECT" switch to display "Leak Valve Close", and the Emergency vent can be operated
manually with "UP" and "DOWN" switches.
6. Press “SELECT” switch to display “undef_OD1 OFF”, and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
7. Press “SELECT” switch to display “undef_OD2 OFF”, and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
8. Press “SELECT” switch to display “undef_OD3 OFF”, and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
9. Press “SELECT” switch to display “undef_OD4 OFF”, and TMS heater and TMS water valve
added by STC-U can be operated manually with "UP" and "DOWN" switches.
10. Press "SELECT" switch in the undef_OD4 operation display to return to the Operation Mode.

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