Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 22
3
INSTALLATION
3.6.2 TMS connection cable
Connect the plug (pin) side of the TMS connection cable to the "TMS X5" of the TMS control unit.
The SCU-801 TMS unit is used with specified STP pumps. Refer to the STP pump Instruction Manual
(B) for the cable connection method.
Note: Figure 15 shows a typical TMS cable. For details of the TMS cable used with the connected
pump module, refer to the STP Pump Instruction Manual (B).
4520
107
9 8

3
1
10
61.6
103
9 7.5
7 6
85
90
SCU-801 side
STP pump side
1
SCU-801 connection
3
TMS heater cable connection
2
TMS valve cable connection
4
TMS sensor cable connection
Figure 15 - TMS connection cable (standard)
6
5
.
3
1
7
1
8
2
1
.
7
98
31
1
0
0
200 57
30
10
SCU-801 side
STP pump side
1
SCU-801 connection
3
TMS valve cable connection
2
TMS heater cable connection
Figure 16 - TMS connection cable (STP-A1603 series)
1
3
2
1
2
3
4