Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 3
1.3.1 Item warranted 3
1.3.2 Disclaimer 3
1.3.3 Spare parts 4
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 SCU-801 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-801 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 23
3.7 Connecting to semiconductor equipment 25
3.7.1 Connecting to power 25
3.7.2 Emergency off circuit (EMO circuit) 25
3.8 Remote communication 26
3.8.1 Parallel communication 26
3.8.2 Serial communication 26
3.9 Adjustment methods 27
3.9.1 Tuning 27
3.9.2 Tuning method 27
3.9.3 Change of data after tuning 29
3.10 Confirmation mode 30
3.10.1 Confirmation method 30
3.11 Parameter set mode 33
3.11.1 Remote operation setting 33
3.11.2 Rotational speed setting 33
3.11.3 TMS setting 33
3.11.4 Rotational inhibit signal setting 33
3.11.5 Emergency vent valve setting 33