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Edwards SCU-801

Edwards SCU-801
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SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 4
1
INTRODUCTION
1.3.3 Spare parts
Air-cooling fan for SCU-801. (When exchanging, contact Service office).
1.4 Labels
The following labels are affixed or printed to the SCU-801. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-801 is equipped with a high voltage device. This label warns operators to pay attention
to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
2. Voltage caution label
This label describes precautions for operating the TMS unit.
Use the specified heater and valve when connecting the TMS unit to the STP pump.
Figure 2 - Voltage caution label

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