Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 21
3
INSTALLATION
3.6.1 STP connection cable
Connect the receptacle (socket) side of the STP connection cable to the STP connector on the STP
pump and connect the plug (pin) side to "P.CONNECTOR X1" on the SCU-801.
105
99
29
20
100
54
52.5 52.5
27 72
70
NOTE)3
105
70
97
54
SCU-801 side
STP pump side
1
60 pin (pin)
2
Blue label
3
60 pin (socket)
4
60 pin (socket, L-Type connector)
Figure 14 - STP pump connection cable
CAUTION
The STP connection cable has the different specification according to the presence of a blue label.
When operating the STP-A1603 series with the TMS unit using the STP connection cable without a
blue label, the TMS unit does not operate (see Table 5).
STP connection cable
TMS unit
Available STP pump
With blue label
Not use
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
Use
Without blue label
Not use
Use
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
Table 5 - STP connection cable specification
1
4
3
2