Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 129
8
MAINTENANCE
8.6.3 Other abnormalities
No.
Symptom
Probable causes
Countermeasures
Referred
section
1
The STP pump
stops.
Rotation INHIBIT signal
input pins (REMOTE X7
(1)-(5)) are open.
When not using this function, short
the circuit between (1)-(5), or set
"Inhibit Command" to "DISABLE".
If these pins are open, the STP
pump will not rotate after
performing the start operation.
4.5.1
3.11
2
The TMS unit does
not function.
Incorrect settings of
TMS function.
Set "TMS Function" to "ENABLE"
to use the built-in TMS unit. Set
"TMS Function" to "External" to
use the External TMS unit.
Set "TMS Function" to "Advanced"
to use both the built-in TMS unit
and the External TMS unit.
3.11
3
Rotation INHIBIT
signal does not
function correctly.
Incorrect settings of
inhibit function.
When using the rotation INHIBIT
signal, set "Inhibit Command" to
"ENABLE".
3.11
Table 45 - Troubleshooting while the STP pump is rotating
8.7 "Error Record" message display function
The SCU-801 can display the contents of up to the last 10 errors on the LCD.
To view the error record, press the "SELECT" switch several times (refer to Section 3.10).
The error number of up to the last 10 errors is displayed on the upper line of the LCD in the form "Error
Record n */*", and the error message is displayed on the lower line.
The first number of "**/**" shows the order of detected errors (the most recent error is number 1) and
the second number shows the number of errors that have occurred up to 10. Thus, a "1/3" would
denote the most recent error out of 3. Press the "UP" or "DOWN" switch to scroll through the list and
display the contents of the next or previous error message in the error record. The date of the detected
error is displayed with "ENTER" switch. (The "UP", "DOWN" and "ENTER" switch can also be used in
Remote Mode, refer to Section 3.10.)