Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 38
3
INSTALLATION
UP DOWN
Levitation NORM:*****rpm
Remote Mode
xxxxx rpm
Remote Mode
COM1
Remote Mode
COM2
Remote Mode
STP-Link
Speed Set Point
xxxxx rpm
Speed Set Point
xxxxx rpm
TMS Function
DISABLE
TMS Function
ENABLE
TMS Function
External
TMS Function
Advanced
Inhibit Command
DISABLE
Inhibit Command
ENABLE
LEAK VALVE Option
DISABLE
LEAK VALVE Option
ENABLE
Second Damage Limit
DISABLE
Second Damage Limit
ENALBE
Cooling Fan Option
DISABLE
Cooling Fan Option
ENABLE
I
UP
＋
A
B
C
D
E
F
G
H

SELECT
ENTER
SELECT
Figure 24 - Parameter setting method
A.
Operation mode
F.
Emergency vent valve setting
B.
Select remote mode
G.
Second Damage Limit setting
C.
Rated speed setting
H.
Cooling fan setting
D.
TMS function setting
I.
To Warning function setting
E.
INHIBIT function setting