Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 117
8
MAINTENANCE
8.5 Error at self test state
When an abnormality/error occurs during the self test while operating the ON switch, the safety
function operates, the "FAILURE" LED illuminates and an alarm signal is output from the REMOTE X7
connector (see Table 10). An error message showing "CAUTION" on the upper line and the contents of
the error are displayed on the lower line of the LCD. If an abnormality/error is found, take measures in
accordance with Table 34.
LCD Messages
Probable causes
Countermeasures
Referred
section
CAUTION
Coupling is Changed
The different STP pump is
used after the tuning is
performed.
Perform tuning.
4.2.2
3.9.1
CAUTION
Different Pump ID
Failure of the SCU-801 or
STP pump.
Contact Service office.
CAUTION
PCB is Initialized
PCB is Corrupted
Failure of the SCU-801.
Contact Service office.
CAUTION
Pump is Initialized
Failure of the SCU-801 or
STP pump.
Contact Service office.
CAUTION
Pump Type is Changed
The STP pump of a different
model is used after the tuning
is performed.
Perform tuning.
4.2.2
3.9.1
CAUTION
Pump&PCB are
Initialized
Failure of the SCU-801 or
STP pump.
Contact Service office.
CAUTION
PumpType is Mismatch
The inappropriate STP pump
is used.
Confirm if the appropriate
STP pump is connected.
2.1
CAUTION
Tuning Error 1
:
:
Tuning Error 19
Tuning failure
After turning OFF and ON,
perform turning.
If the RESET operation does
not reset error message,
contact Service office.
3.9.1
CAUTION
Tuning Not Completed
Turning is not completed.
Perform tuning.
3.9.1
Please contact
a service centre
The control parameter is not
in the memory of the STP
pump.
Contact Service office.
Table 34 - Error messages at self test state