CONTENTS (CONTINUED)
Section Title Page
3.11.6 Second Damage Limit setting 34
3.11.7 Pump air-cooling fan output setting 34
3.11.8 Warning function setting 35
3.11.9 Serial port COM1 setting 36
3.11.10 Serial port COM2 setting 36
3.11.11 Serial port COM3 setting 36
3.11.12 Date/Time setting 36
3.11.13 EdCentra setting 36
3.11.14 Factory setting 36
3.11.15 Parameter setting procedure 37
3.12 Manual operation mode 44
4 OPERATION 47
4.1 Before starting the STP pump 47
4.1.1 Confirmation before starting 47
4.1.2 Confirmation of vacuum system 47
4.2 Powering ON 48
4.2.1 Self test 48
4.2.2 "CAUTION" message in the self test state 48
4.3 How to start/stop the STP pump 49
4.4 Manual start/stop the STP pump 49
4.4.1 Starting the STP pump 49
4.4.2 Stopping the STP pump 49
4.4.3 Starting the STP pump after stopping 49
4.5 Remote operation 51
4.5.1 Input signal pins 51
4.5.2 Output signal pins 53
4.5.3 Remote setting 56
4.5.4 Starting/Stopping the STP pump 56
4.5.5 Rotation INHIBIT signal 57
4.5.6 Starting the STP pump after stopping 58
4.5.7 Starting the STP pump after a safety function operates 58
4.6 Powering OFF 58
4.7 Operating the TMS unit (for use with the TMS unit) 59
4.7.1 Before starting 59
4.7.2 Starting/Stopping 59
4.7.3 Setting the TMS unit function 59
4.7.4 Temperature control 60
5 SERIAL COMMUNICATION PROTOCOL 61
5.1 Introduction 61
5.2 Connection and setting up 62
5.2.1 Signal connection 62
5.2.2 Connecting the RS485 64
5.2.3 Communication parameter setting 66
5.2.4 Recommended items about communication cable installation 67
5.3 Protocol specifications 70
5.3.1 General description 70
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