Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 71
5.3.3 Control command
(in the RS232/RS485 single point connection) 72
5.3.4 Query command
(in the RS232/RS485 single point connection) 73
5.3.5 Transmission data format 74
5.3.6 Frame control (checksum) 74
5.3.7 Error control 75
5.3.8 Transmission frame in the RS485 multi-point connection 76
5.3.9 Control command in the RS485 multi-point connection 77
5.3.10 Query command in the RS485 multi-point connection 79
5.3.11 Broadcasting command in the RS485 multi-point connection 80
5.3.12 Application note 81
5.4 Command specifications 85
5.4.1 Command list 85
5.4.2 ReadMeas 86
5.4.3 Command 86
5.4.4 ReadFailMess 87
5.4.5 ReadModFonct 90
5.4.6 ReadVersion 92
5.4.7 ReadCounters 93
5.4.8 ReadSetPoint 94
5.4.9 ReadMotorTemp 94
5.4.10 ReadStatus 95
5.4.11 ReadEvents 96
5.4.12 SetSpeedSetPoint 97
5.4.13 ReadSpeedSetPoint 98
5.4.14 ReadModFonctWithWarning 99
5.4.15 ReadMeasValue 102
6 STP-LINK 105
7 EDCENTRA 107
8 MAINTENANCE 109
8.1 Safety functions 109
8.1.1 Power failure 109
8.1.2 Operation after a power recovery 110
8.1.3 Abnormal state of magnetic bearing 110
8.1.4 Excessive vibration 111
8.1.5 Motor driver overload 111
8.1.6 Overheating inside the STP pump 111
8.1.7 Overheating inside the SCU-801 111
8.1.8 Overspeed 111
8.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 112
8.1.10 Failure of the air-cooling fan 112