Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
8.2 "WARNING" message function 113
8.2.1 "WARNING" message display function 113
8.3 "WARNING" message description 114
8.3.1 Damage point function 114
8.3.2 First damage limit 114
8.3.3 Second damage limit 114
8.3.4 Imbalance X_H, X_B, Z 115
8.3.5 Pump run time over 115
8.3.6 Pump overload 115
8.3.7 Low RTC battery 115
8.4 "WARNING" function setting 116
8.5 Error at self test state 117
8.5.1 Error after self test 118
8.5.2 Error messages 118
8.5.3 Troubleshooting immediately after power failure occurs 118
8.5.4 Troubleshooting immediately
after other abnormality/errors occur 119
8.6 When error message is not displayed on LCD 128
8.6.1 Abnormalities when powering ON 128
8.6.2 Abnormalities when performing rotational operation 128
8.6.3 Other abnormalities 129
8.7 "Error Record" message display function 129
8.8 Maintenance and inspection 130
8.8.1 Cleaning 131
8.8.2 Maintenance 131
9 STORAGE, TRANSPORTATION AND DISPOSAL 133
9.1 Storage of the SCU-801 133
9.2 Transporting for repair or overhaul 133
9.3 Disposal 134
10 SERVICE, SPARES AND ACCESSORIES 135
10.1 Introduction 135
10.2 Service 135
10.3 Spares 135
10.4 Accessories 136