Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 101
5
SERIAL COMMUNICATION PROTOCOL
Example:
Pump operation mode
: 01
hex
= 1 = Levitation
WARNING being detected
: 0098
hex
= 0008
hex
OR 0010
hex
OR 0080
hex
=
3 warnings of "WARNING: Imbalance X_H", "WARNING:
Imbalance X_B" and "WARNING: Pump Overload"
The number of error
: 02
hex
= 2 errors
Error 1
: 0D
hex
= 13 = Disturbance Xh
Error 2
: 0F
hex
= 15 = Disturbance Xb
Error 3 to 77
: 00
hex
= No error detected
Parameter
1
2
3
4
5
6
7
8
9
10
ASCII
0
1
0
0
9
8
0
2
0
D
0
F
0
0
0
0
0
0
0
0
0
0
HEX
30
31
30
30
39
38
30
32
30
44
30
46
30
30
30
30
30
30
30
30
30
30
Parameter
11
12
13
[Omitted]
68
69
70
71
72
73
74
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
1
0
2
0
D
0
F
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
75
76
77
78
79
80
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30