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SCU-801 Control Unit for Turbomolecular Pump

MT-95E-001-A

Page 12

TECHNICAL DATA

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Main Page

Table of Contents7
Introduction13
Scope and Definitions13
Electromagnetic Compatibility14
Limited Warranty15
Item Warranted15
Disclaimer15
High Voltage Device Caution Label16
Voltage Caution Label16
Spare Parts16
Labels16
Voltage Rating Label17
Safety Instruction Label18
Connector Caution Label18
Label Affixing Positions18
Turbomolecular Pumps19
General Description19
Cable Sets20
Technical Data21
Specifications21
Installation25
Unpacking25
Front Panel25
Rear Panel28
Precautions before Installation29
Operating Environment29
Insulation Test29
Installation Area30
Example of Securing the SCU-80131
Attaching the SCU-801 to a Rack31
Cable Connection32
STP Connection Cable Specification33
STP Pump Connection Cable33
STP Connection Cable33
TMS Connection Cable (Standard)34
TMS Connection Cable (STP-A1603 Series)34
TMS Connection Cable34
Power Cable35
Connecting to Semiconductor Equipment37
Connecting to Power37
Emergency off Circuit (EMO Circuit)37
REMOTE X7 Connector38
Connector X3A, X3B, X6 (D-Sub 9)38
Remote Communication38
Parallel Communication38
Serial Communication38
Adjustment Methods39
Tuning39
Tuning Method39
Remote Mode41
Change of Data after Tuning41
Confirmation Mode42
Confirmation Method42
Error Detailed Information44
Parameter Set Mode45
Remote Operation Setting45
Rotational Speed Setting45
TMS Setting45
Rotational Inhibit Signal Setting45
Emergency Vent Valve Setting45
Second Damage Limit Setting46
Pump Air-Cooling Fan Output Setting46
Warning Function Setting47
Serial Port COM1 Setting48
Serial Port COM2 Setting48
Serial Port COM3 Setting48
Date/Time Setting48
Edcentra Setting48
Factory Setting48
Parameter Setting Procedure49
Parameter Setting Method50
Parameter Setting Method (Continued)51
Parameter Setting Method (Continued)53
Parameter Setting Method (Continued)54
Manual Operation Mode56
Manual Operation Method57
Operation59
Before Starting the STP Pump59
Confirmation before Starting59
Confirmation of Vacuum System59
Powering on60
Self Test60
CAUTION" Message in the Self Test State60
How to Start/Stop the STP Pump61
Manual Start/Stop the STP Pump61
Starting the STP Pump61
Stopping the STP Pump61
Starting the STP Pump after Stopping61
Remote Operation63
Input Signal Pins63
REMOTE X7 Input Signal Pins64
REMOTE X7 Input Signal Pins65
Output Signal Pins65
REMOTE X7 Output Signal Pins66
REMOTE X7 Output Signal Pins67
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)68
Remote Setting68
Starting/Stopping the STP Pump68
Rotation INHIBIT Signal Input69
Rotation INHIBIT Signal69
Starting the STP Pump after Stopping70
Starting the STP Pump after a Safety Function Operates70
Powering off70
Operating the TMS Unit (for Use with the TMS Unit)71
Before Starting71
Starting/Stopping71
Setting the TMS Unit Function71
TMS Function Setting Value and Indication72
Temperature Control72
Serial Communication73
Serial Communication Protocol73
Introduction73
Connector X3A/X3B (D-Sub 9)74
Connection and Setting up74
Signal Connection74
X6 Pin Position75
Connecting the RS48576
Communication Parameters78
Communication Parameter Setting78
Grounding Example (both Ends Grounding)79
Recommended Items about Communication Cable Installation79
Grounding Example (Single Point Grounding)80
Pump Operation Commands82
Protocol Specifications82
General Description82
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)83
Control Command84
- (In the RS232/RS485 Single Point Connection)84
Query Command85
- (In the RS232/RS485 Single Point Connection)85
Transmission Data Format86
Frame Control (Checksum)86
Error Control87
Transmission Frame in the RS485 Multi-Point Connection88
Control Command in the RS485 Multi-Point Connection89
Query Command in the RS485 Multi-Point Connection91
Pump Operation Commands92
Broadcasting Command in the RS485 Multi-Point Connection92
Application Note93
Example of Answer Resending Process94
Example of Command Sending During Answer Data Reply94
Command Specifications97
Command List97
Readmeas98
Command98
Readfailmess99
Error Message Values101
Error Message Values (Continued)102
Readmodfonct102
Pump Operation Mode103
Control Unit104
Readversion104
Readcounters105
Readsetpoint106
Readmotortemp106
Readstatus107
Readevents108
Setspeedsetpoint109
Readspeedsetpoint110
Readmodfonctwithwarning111
Readmeasvalue114
Stp-Link117
Edcentra119
Backup Rotational Speed121
Maintenance121
Safety Functions121
Power Failure121
States of LCD, Leds and REMOTE Output Signals at a Power Failure122
Operation after a Power Recovery122
Abnormal State of Magnetic Bearing122
Excessive Vibration123
Motor Driver Overload123
Overheating Inside the STP Pump123
Overheating Inside the SCU-801123
Overspeed123
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)124
Failure of the Air-Cooling Fan124
WARNING" Message Function125
WARNING" Message Display Function125
WARNING" Message Description126
Damage Point Function126
First Damage Limit126
Second Damage Limit126
Imbalance X_H, X_B, Z127
Pump Run Time over127
Pump Overload127
Low RTC Battery127
WARNING" Function Setting128
Default Setting of "WARNING" Function128
Factory Setting and Variable Range128
Error at Self Test State129
Error Messages at Self Test State129
Error after Self Test130
Error Messages130
Troubleshooting Immediately after Power Failure Occurs130
Troubleshooting Immediately after Other Abnormality/Errors Occur131
When Error Message Is Not Displayed on LCD140
Abnormalities When Powering on140
Abnormalities When Performing Rotational Operation140
Troubleshooting When Powering on140
Troubleshooting When Performing the STP Pump Start Operation140
Other Abnormalities141
Error Record" Message Display Function141
Troubleshooting While the STP Pump Is Rotating141
Maintenance and Inspection142
Cleaning143
Maintenance143
Storage, Transportation and Disposal145
Storage of the SCU-801145
Transporting for Repair or Overhaul145
Disposal146
Service, Spares and Accessories147
Introduction147
Service147
Spares147
Power Cable148
Accessories148

Edwards SCU-801

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