Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 28
3
INSTALLATION
Note: Once tuning is completed, re-tuning is not required unless the configuration (the STP pump
serial number, the SCU-801 serial number, and the STP connection cable length) is changed.
Although the STP pump produces an abnormal noise during tuning, this is not an indication of
abnormality.
A.
Press "RESET" switch
B.
Press "UP" or "DOWN" switch
C.
Press "ENTER" switch
D.
Press "RESET" switch for approximately 3 seconds
Figure 21 - Tuning procedures
Software Version
95_**.*
Autotest
2023/MAY/20 15:40
Autotest complete CAUTION
Coupling is Changed
CAUTION
Pump Type is Changed
STP-603/1003
DATA COPY? No
STP-603/1003
DATA COPY? Yes
A
Press RESET 3sec
to Update Data
Updating Data
from Pump to PCB
Tuning
STP-603/1003
Tuning
Tuning complete
Levitation
B
C
D