Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
Page 50
4
OPERATION
Software Version
95 * *.*
A
Autotest
2023/MAY/20 15:40
Autotest
STP-604/1003
Autotest complete
Levitation
TMS TEMP : **
ACCEL: ***00rpm
TMS TEMP : **
NORM : ***00rpm
TMS TEMP : **
BRAKE: ***00rpm
TMS TEMP : **
B
C
D
E
F
G
H
I
J
K
Figure 31 - Operational procedures
A.
MAIN POWER "ON"
E.
Self test completed
(upper only)
H.
Normal Operation State
Upper: Normal operation state
Lower: TMS actual temp
(for only with TMS unit)
B.
Version
C.
Self test
Upper: Autotest
Lower: Date
F.
Levitation State
Upper: Levitation state
Lower: TMS actual temp
(for only with TMS unit)
I.
Break State
Upper: Brake state
Lower: TMS actual temp
(for only with TMS unit)
D.
Self test
Upper: Autotest
Lower: Model of
connected pump
G.
Acceleration State
Upper: Acceleration state
Lowe: TMS actual temp
(for only with TMS unit)
J.
Start operation of the STP pump
K.
Stop operation of the STP pump