Specifications PlasmaQuant 9100 (Elite)
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10 Specifications
10.1 Technical data
10.1.1 Basic device technical data
PlasmaQuant PQ 9100 Elite
Monochromator Echelle grating double-monochromator with a focal length of
F= 400 mm
and variable gap; pre-monochromator with quartz
prism, wavelength selection via additional reflected neon radi-
ator
Wavelength range 160 to 900 nm
Wavelength accu-
racy
< 0.4 pm
Spectral resolu-
tion
0.002 nm at 200 nm, 0.006 nm at 400 nm, 0.009 nm at
600 nm
Experimental
width at half
height
≤ 3.5 ppm for As 193.696 nm, P 231.618 nm,
Cd 228.022 nm
Resolution 1:145 000
Grating Mechanically etched grating, 79 grooves/mm, blaze angle at
76°
Photometer opti-
cal table enclosure
Modular optic design on a compact cast baseplate for stability
and durability
Protection against moisture, exhaust and chemical environ-
mental influences
Detector Two-dimensional FFT backside illuminated CCD with high
quantum efficiency and increased UV sensitivity
PlasmaQuant PQ 9100
Monochromator Echelle grating double-monochromator with a focal length of
F= 400 mm
and variable gap; pre-monochromator with quartz
prism, wavelength selection via additional reflected neon radi-
ator
Wavelength range 160 to 900 nm
Wavelength accu-
racy
< 0.4 pm
Spectral resolu-
tion
0.006 nm at 200 nm
Resolution 1:70 000
Photometer opti-
cal table enclosure
Modular optic design on a compact cast baseplate for stability
and durability
Protection against moisture, exhaust and chemical environ-
mental influences
Detector Two-dimensional FFT backside illuminated CCD with high
quantum efficiency and increased UV sensitivity