EasyManua.ls Logo

HP 5973 - Page 115

HP 5973
297 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
4 Maintaining the MSD
To remove the diffusion pump
115
10 Remove the diffusion pump through the side of the MSD.
You may have to tilt the pump slightly to remove it. Do not tilt the pump past 45° if
the pump is warm.
KF50 clamp
O-ring assembly
Diffusion pump
Diffusion pump outlet
Foreline gauge assembly

Table of Contents

Other manuals for HP 5973

Related product manuals