5
Vacuum System
This chapter describes components of the vacuum system in the MSD
Diffusion pump MSD vacuum system, 186
Turbo pump MSD vacuum system, 187
Diffusion pump vacuum manifold, 188
Turbo pump vacuum manifold, 189
Side plate, 190
Vacuum seals, 192
Foreline pump, 194
Foreline gauge, 196
Diffusion pump and fan, 198
Turbomolecular pump and fan, 202
Calibration valve and vent valve, 204
Triode gauge tube, 206
Gauge controller, 208
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