126
4 Maintaining the MSD
To remove the foreline gauge
To remove the foreline gauge
Materials needed:
Screwdriver, flat-blade, large (8730-0002)
1 Vent the MSD (page 52).
2 Separate the MSD from the GC (page 112).
3 Unplug the foreline gauge cable from the foreline gauge.
4 Disconnect the foreline gauge assembly from the diffusion pump outlet.
5 Loosen the hose clamp.
6 Pull the foreline gauge assembly out of the foreline hose.
: $ 5 1 , 1 * 7KHIRUHOLQHSXPSDQGGLIIXVLRQSXPSPD\VWLOOEHKRW
&$87,21
Be sure the MSD is vented to atmosphere before breaking the seal at the foreline gauge.
Never
vent the MSD at the pump end; use the vent valve.