132
4 Maintaining the MSD
To reinstall a calibration valve
To reinstall a calibration valve
Materials needed:
Calibration valve
for diffusion pump (G1099-60200)
for turbomolecular pump (G1099-60203)
O-ring, for calibration valve (0905-1217) – replace if the old O-ring is damaged
PFTBA (05971-60571) or other tuning compound
Screwdriver, TORX T-15 (8710-1622)
1 Remove the old calibration valve (page 130).
2 Make sure the calibration valve O-ring is in place.
If the O-ring is worn or damaged, replace it.
3 Install the calibration valve.
Tighten the screws that hold it in place. Make sure you use the calibration valve
that matches the high vacuum pump in your MSD. The different calibration valves
have different restrictors. Using the wrong valve will interfere with tuning.
4 Reconnect the calibration valve cable to the connector next to the fan.
5 Remove the vial from the new calibration valve (page 122).
The valve is supplied with a vial already installed.
6 Fill and reinstall the calibration vial (page 124).
7 Pump down the MSD (page 58).
8 Select
Purge Cal Valve from the Vacuum menu in the Diagnostics/Vacuum
Control view.
&$87,21
Failure to purge the calibration valve will result in damage to the filaments and detector.
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