HP 5973 - Turbo Pump Controller

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8 Electronics
Turbo pump controller
Turbo pump controller
The turbo pump controller provides power to the turbomolecular pump and regu-
lates pump speed. If the pump fails to reach 80% speed within 10 minutes after
beginning pumpdown, or if the speed drops below 50% during operation, the con-
troller shuts off the turbo pump and triggers a fault state.