HP 5973 - To Adjust the RF Coils

4 Maintaining the MSD
To adjust the RF coils
179
To adjust the RF coils
Materials needed: Screwdriver, flat-blade, large (8730-0002)
1 Make sure the MSD is at thermal equilibrium.
It takes at least 2 hours after all heated zones have reached their setpoints for the
MSD to reach thermal equilibrium.
2 Remove the upper MSD cover (page 50).
3 Make sure the RF cover is secure and no screws are missing.
A loose RF cover or missing screw can significantly affect coil adjustment.
4 In the Diagnostics/Vacuum Control view, select
Set RFPA from the
Diagnostics menu.
5 Enter an amu value of 100.
6 Slowly turn the RF coil adjustment screws to minimize the voltage
displayed.
Turn the adjustment screws alternately. Turn each screw only a little bit at a time.
Keep the screws at equal extension. The minimum voltage is typically between 70
and 100 mV.
7 When the voltage is minimized, click the
Stop button.
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Do not use a coin to adjust the RF coils. If you drop it, it could fall into the electronics fan
and cause significant damage.