164
4 Maintaining the MSD
To reinstall the heater and sensor in the ion source
To reinstall the heater and sensor in the ion source
Materials needed:
Gloves, clean, lint-free
large (8650-0030)
small (8650-0029)
Hex ball driver, 1.5-mm (8710-1570)
Hex ball driver, 2.0-mm (8710-1804)
Hex nut driver, 5.5-mm (8710-1220)
Source heater assembly (G1099-60177)
1 Unpack the new source heater assembly.
The heater, temperature sensor, and heater block are already assembled.
2 Reinstall the repeller, repeller insulators, washer, and repeller nut.
The resulting assembly is called the repeller assembly.
3 Connect the repeller assembly to the source body.
4 Reinstall the filaments.
5 Reinstall the ion source in the source radiator (page 156).
Do not forget to reconnect the wires from the feedthrough board to the ion source.
Do not forget to reconnect the heater and temperature sensor wires to the
feedthrough board.
6 Close the vacuum manifold (page 56).
7 Pump down the MSD (page 58).
&$87,21
Do not overtighten the repeller nut, or the ceramic repeller insulators will break when the
source heats up. The nut should only be “finger-tight”.
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