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5 Vacuum System
Diffusion pump MSD vacuum system
Diffusion pump MSD vacuum system
The high vacuum pump in the HP G1098A model of the MSD is a vapor diffusion
pump. A diffusion pump requires baffling to prevent vapor from migrating into the
vacuum manifold. Foreline pressure is monitored by the foreline gauge. The ac
board controls the diffusion pump heater. The diffusion pump MSD can accept up
to 2 ml/min carrier gas flow.
Diffusion pump baffle adapter
Diffusion pump
Foreline gauge
Too hot switch
Manifold cooling fins
Calibration valve
Diffusion pump vacuum manifold
Too cold switch
High vacuum cooling fan
(diffusion pump position)
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