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HP 5973 - Turbo Pump MSD Vacuum System

HP 5973
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5 Vacuum System
Turbo pump MSD vacuum system
187
Turbo pump MSD vacuum system
The high vacuum pump in the HP G1099A model of the MSD is a turbomolecular
(turbo) pump. A turbo pump requires a screen to keep debris out of the pump,
but no baffle is necessary. Pump speed is controlled by the turbo controller; there
is no foreline gauge. The turbo pump MSD can accept up to 4 ml/min carrier gas
flow. The calibration valve has a restrictor with a larger internal diameter.
Turbo pump controller
Calibration valve
Turbo pump vacuum manifold
High vacuum cooling fan
(turbo pump position)
Turbo pump

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