HP 5973 - Page 266

266
9 Parts
Vacuum system
Table 15 Turbomolecular pump MSD vacuum system components
Description HP part number
Baffle (inside stem of triode gauge tube – not shown) 05972-00015
Calibration valve assembly G1099-60203
calibration vial 05980-20018
Claw clamps for turbo pump 0100-1881
Collar for triode gauge tube 05972-60210
Fan 3160-1037
KF25 clamp (for turbo pump outlet) 0100-0549
KF25 O-ring assembly (for turbo pump outlet) 0100-1551
Manifold end plates
front G1099-20552
rear G1099-20553
Shield for triode gauge tube port G1099-00003
Side plate (includes thumbscrews) G1099-60021
Triode gauge tube 0960-0897
Turbomolecular pump
1
G1946-89001
Turbo pump controller G1099-89002
Turbo pump seal
1
0100-1879
Vacuum manifold G1099-20550
Vent valve knob G1099-20554
1 The turbo pump and its seal are not user-replaceable parts. Refer
service to your Hewlett-Packard service representative.