Inficon XTC/3

5 - 16
XTC/3 Operating Manual
2 Source Shutter 2
3 Sensor Shutter 1
4 Sensor Shutter 2
5 Stop
6 End of Process
7 Thickness Setpoint
8 Crystal Fail
9 Alarms
10 Source in use (Open=1; closed=2)
11 Final Thickness
12 End of Film
13 In Layer
14 Ion Assisted Deposition
15 Crystal Switcher 1
16 Crystal Switcher 2
17 Ready
18 Crucible Switching
19 Rise 1
20 Soak 1
21 Rise 2
22 Soak 2
23 Shutter Delay
24 Deposit
25 Rate Ramp
26 Manual
27 Time Power
28 Idle Ramp
29 Idle
30 Max Power
31 Rate Deviation Error
32 Crystal Switcher Fail