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Inficon XTC/3 User Manual
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XTC/3 Operating Manual
2 Source Shutter 2
3 Sensor Shutter 1
4 Sensor Shutter 2
5 S
top
6 End of Process
7 Thickness Setpoint
8 Crystal Fail
9 Alarms
10 Source in use (Open=1; closed
=2)
1
1 Final Thickness
12 End of Film
13 In Layer
14 Ion Assisted Deposition
15 Crystal Switcher 1
16 Crystal Switcher 2
17 Ready
18 Crucible Switching
19 Rise 1
20 Soak 1
21 Rise 2
22 Soak 2
23 Shutter Delay
24 Deposit
25 Rate Ramp
26 Manual
27 T
ime Power
28 Idle Ramp
29 Idle
30 Max Power
31 Rate Deviation Error
32 Crystal Switche
r Fail
118
120
Table of Contents
Default Chapter
5
Table of Contents
5
Introduction and Specifications
12
Chapter 1 Introduction
12
Related Manuals
13
XTC/3 Safety
13
Definition of Notes, Cautions and Warnings
13
General Safety Information
14
Earth Ground
15
Main Power Connection
15
How to Contact INFICON
16
Returning Sensor to INFICON
16
XTC/3 Specifications
17
Measurement
17
Screens and Parameters
17
Process Recipe Storage
18
Film Parameters
18
Display
19
Source / Recorder Outputs
20
Relays / Inputs
20
Remote Communications
21
Accessories
21
Power
21
Operating Environment
22
Storage Temperature
22
Warm up Period
22
Size
22
Connector Clearance Requirements
22
Weight
22
Cleaning
22
Base Configurations
23
Parts and Options Overview
23
Unpacking and Inspection
23
Accessories
24
Replacement Cables & Oscillators
25
Sensors
25
Initial Power on Verification
27
Installation and Interfaces
29
Chapter 2 Location Guidelines
29
Sensor Types
29
Sensor Installation
30
XTC/3 Installation
32
Avoiding Electrical Interference
32
Verifying/Establishing Earth Ground
32
Connections to Earth Ground
33
Minimizing Noise Pickup from External Cabling
34
Connecting the Controller
35
Verifying the Correct Input Voltage
35
Routing Oscillator (XIU) Cables
35
Interface Cable Fabrication and Pin-Out
35
Source Control Connection
35
Input and Output Connections
36
System I/O Connector
37
Aux I/O Connector
38
Inputs
38
RS-232C Communications
39
TCP/IP Communications Connection (Optional)
39
Network Connection
39
Change the IP Address in XTC/3
39
PC Setup
39
Operation
40
Chapter 3
40
Front Panel Controls
40
Rear Panel Interfaces
41
Displays
43
Menu Display
44
Operate Display
44
Crystal Life and Starting Frequency
47
Choosing the Right Crystal
47
Percent Life Auto-Zero
47
Film Name Display
48
Process List Display (XTC/3M Only)
49
General Parameter Display
50
I/O Map Display
51
Diagnostics Display
51
Sensor Information Display
52
Executing a Process
53
State Descriptions
56
Alarms and Stops
62
Alarms
62
Stops
62
Recovering from STOP
63
Special Features
63
Automating a Process
63
Ion Assisted Deposition
64
Control Delay
64
Shutter Delay
64
Rate Ramp Trigger of Final Thickness
64
Transfer Sensor
64
Crucible Switching
65
Bin Mode
65
BCD Mode (XTC/3M Only)
65
Crystal Switching
65
Crystaltwo
66
Crystalsix
67
Crystal12
67
Rotary Sensor Crystal Switching
68
Dual Head
68
XTC/3S Sensor Shutter / Crystalswitch Output
69
Start Layer Without Backup Crystal Configuration
69
Ratewatcher
70
Hand-Held Controller (Option)
70
Lock Code
71
Parameter Clear
71
Datalog
71
Tcp/Ip
72
XTC/3 Programming
73
Chapter 4
73
Overview
73
Film Set up Overview
75
Film Set up
75
Film Definition
76
Film Definition Parameters
77
Pre/Post Deposition Parameters
77
Deposit
79
Sensor Parameters
80
Setting S&Q Parameters (Soft Crystal Failures)
81
Stability
81
Quality
82
Source Parameters
83
Option
86
Process Set-Up Overview (XTC/3M Only)
88
Process Definition
89
Process Number
89
Process Name
89
Building the Layer Sequence
89
General Parameters
90
Process Parameters
91
Hardware Parameters
93
XTC/3S Film Select Option
95
Comm Info
96
Remote Communication Parameters
97
I/O Overview
98
XTC/3S Inputs and Outputs
99
XTC/3M Inputs
100
XTC/3M Outputs
101
Clear Input or Output
103
Remote Communications
104
Chapter 5 Remote Communications Overview
104
Message Protocols
104
Physical Connections
105
RS-232C Serial Port
105
TCP/IP Ethernet Port
105
Network Connection
105
How to Set up the Network Protocol on the PC
106
Standard Protocol Message Format
109
Standard Protocol
109
Standard Command Packet (Host to XTC/3 Message)
109
Standard Response Packet (XTC/3 to Host Message)
111
Standard Communication Commands
113
Standard ECHO Command
113
Standard HELLO Command
113
Standard QUERY Commands
114
Query Block
114
Standard Query Film Name (XTC3/M Only)
116
Standard Query Film Parameters
116
Standard Query General Parameter
116
Standard Query Input Definition (XTC/3M Only)
117
Standard Query Output Definition (XTC/3M Only)
118
Standard Query Output Type Definition (XTC/3M Only)
121
Standard Query Process Parameters (XTC/3M Only)
121
Standard UPDATE Commands
122
Update Block
122
Standard Update Film Name (XTC/3M Only)
123
Standard Update Film Parameters
124
Standard Update General Parameters
128
Standard Update Input Definition (XTC/3M Only)
130
Standard Update Output Definition (XTC/3M Only)
130
Standard Update Output Type Definition (XTC/3M Only)
130
Standard Update Process Parameters (XTC/3M Only)
131
Standard STATUS Commands
131
Standard REMOTE Commands
137
Basic Command Structure
139
XTC/2 Protocols
139
XTC/2 Serial Communication with Checksum
140
XTC/2 Serial Communications - no Checksum
140
XTC/2 Error Codes
141
XTC/2 Message Strings
142
XTC/2 ECHO Command
142
XTC/2 HELLO Command
142
XTC/2 QUERY Command
142
XTC/2 UPDATE Command
144
XTC/2 STATUS Command
145
XTC/2 REMOTE Commands
149
XTC/2 Sample Host Programs
151
XTC/2 Program Without Checksum
151
XTC/2 Program with Checksum
152
Troubleshooting, Status and Error Messages
154
Chapter 6
154
Status and Error Messages
154
XTC/3 Diagnostics
159
Troubleshooting Guide
161
Troubleshooting XTC/3
162
Troubleshooting Transducers/Sensors
165
Verifying Crystal Switching and Rotation
165
Verifying Sensor Shutter Operation
165
Troubleshooting Computer Communications
171
TCP/IP Module LED Diagnostics
171
Replacing the Crystal
172
Front Load Single Sensors
172
Shuttered Front Load Single and Front Load Dual Sensors
173
Cool Drawer Sensor
173
Bakeable Sensor
175
Sputtering Sensor
176
Crystal Snatcher
177
Crystalsix
177
Crystal12
177
Crystal Sensor Emulator PN 760-601-G2
178
Diagnostic Procedures
179
Measurement System Diagnostic Procedure
179
Feed-Through or In-Vacuum Cable
180
Diagnostic Procedure
180
Sensor Head or Monitor Crystal Diagnostic Procedure
181
System Diagnostics Pass but
182
Crystal Fail Message Remains
182
XTAL Life
182
Sensor Cover Connection
183
Compatible Sensor Heads
183
Incompatible Sensor Heads
183
Specifications
184
Calibration Procedures
185
Chapter 7
185
Importance of Density, Tooling and Z-Ratio
185
Determining Density
185
Determining Tooling
186
Laboratory Determination of Z-Ratio
187
Estimating Z-Ratio
188
Measurement and Control Theory
189
Chapter 8 Basics
189
Monitor Crystals
190
Period Measurement Technique
192
Z-Match Technique
193
Active Oscillator
194
Modelock Oscillator
195
Control Loop Theory
197
Material Table
201
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Inficon XTC/3 Specifications
General
Brand
Inficon
Model
XTC/3
Category
Controller
Language
English
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