5 - 43
XTC/3 Operating Manual
S6. . . . . . Active layer. x
S7. . . . . . Active film x
S8. . . . . . Active sensor. x
S9. . . . . . Crystal life (%). x % to xx %
S10. . . . . Power source number. x (1 or 2)
S11 . . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each
byte has an ASCII value of 0 or 1, corresponding to the output status.
Response Format (Non-Checksum):
Byte1............Byte16<ACK> where byte 1 corresponds to output 1.
Table 5-9 XTC/2 Output Status bits
Output# Output Default
function
Output state
1 Source Shutter 1 1=open, 0=closed
2 Source Shutter 2 1=open, 0=closed
3 Sensor Shutter 1 1=open, 0=closed
4 Sensor Shutter 2 1=open, 0=closed
5 Stop 1=Stop, 0=not stop
6 End of Process 1=End of process, 0=not end of process
7 Thickness Setpoint 1=Thk Setpoint
8 Soak 2 1=Soak 2 phase
9 Crystal Fail 1=Xtal Fail
10 Alarms 1=Alarm Cond.
11 Source 1/Source 2,
(toggle)
1=Source 2, 0=Source 1
12 End Deposit
(Final Thickness)
1=End Deposit (Final Thickness) reached
13 Crucible Select LSB
(XTC/2) BCD value representing crucible position
of active source:
000 = Position 0 or 1
111 = Position 8
14 Crucible Select
(XTC/2)
15 Crucible Select MSB
(XTC/2)
16 unused
To Next Page
Loading...
Need help?
General
