Inficon XTC/3 User Manual

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XTC/3 Operating Manual
1 = Selection active, 0 = default state for selection
Also see S22 below.
NOTE: In the default configuration, bits 8 and 9 will return values of 1 whereas the
defaults for these bits was 0 in XTC/2. If it is desired to make the S20
response equal to XTC/2 default response, change the Recorder Range to
100 and the Audio Feedback to Yes, both per section 4.4.2 on page 4-21.
Table 5-11 S20 Command Input status
Byte # Function State
# 1 Test Mode (0 = off, 1 = on)
# 2 Parameter Lock (0 = off, 1 = on)
# 3 Control Mode (0 = deposit, 1 = etch)
# 4 Stop On Alarms (0 = no, 1 = yes)
# 5 Stop on Max Power (0 = no, 1 = yes)
# 6
# 7
# 8
Recorder Type
(in order:
Byte 6, 7, 8)
000 designates Rate, 100 Å/s full scale
(unfiltered)
001 designates Rate, 1000 Å/s full scale
(unfiltered)
010 designates Thickness, 100 Å full scale
011 designates, 1000 Å full scale
100 designates Power %
101 designates Rate Deviation (±50 Å/s)
110 designates Rate 100 Å/s full scale -
smoothed
111 designates Rate 1000 Å/s full scale -
smoothed
# 9 Beep On/Off (0=on, 1=off)
# 10 Backlight Dim (0 = no, 1 = yes)
# 11 Start Layer without
backup crystal
(0 = no, 1 = yes)
NOTE: See section 3.6.9 on page 3-30 for
description
# 12 Input Option 0 = Standard, 1 =Film Select
# 13 Not used, returns 0
# 14
# 15
Sensor Type
(in order: Byte 14,
15)
00 = Single Head(s)
10 = Single CrystalSix on sensor 1
11= Two CrystalSix sensors
# 16 Source Control
Voltage polarity
0 = neg, 1 = pos

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English