Inficon XTC/3 User Manual

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XTC/3 Operating Manual
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Table 1-1 Crystal12 sensor
Crystal12 Sensor Package XL12-xxxxX XL12-
Base Unit
None 0
Crystal 12 Sensor 1
In-Vacuum Cable Assembly Length
None 0
78 cm (30.75 in.) 1
15.2 cm (6 in.) 2
30.5 cm (12 in.) 3
61 cm (24 in.) 4
91.4 cm (36 in.) 5
121.9 cm (48 in.) 6
152.4 cm (60 in.) 7
182.9 cm (72 in.) 8
Crystal Carousel Assembly
One (Included in Base Unit) 0
Spare Crystal Carousel Assembly 1
Front Deposition Shield
One (Included in Base Unit) 0
Spare Front Deposition Shield 1
Mounting Post with Hardware
None 0
Mounting Post Kit 1
Example: Crystal12 sensor with 78 cm (30.75 in.) cable, spare
carousel, spare front deposition shield, mounting post kit, and
solenoid valve is PN XL12-11111.

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English