Inficon XTC/3 User Manual

3 - 6
XTC/3 Operating Manual
A graphical representation of rate deviation or the power over time will also be
displayed. The graph display can be modified by placing the cursor on the Y-axis
graph label and pressing TOGL to toggle between rate deviation and power. The
rate deviation scale can also be toggled between 5,10, 20 and 40 Å/s when the
cursor is placed on the graph Y-axis value.
System messages and errors are displayed on all screens except I/O Map.
NOTE: On XTC/3M, if there are no Process or Film names—they are replaced
by the Process and/or Film number.
Figure 3-4 XTC/3M operate display
Figure 3-5 XTC/3S operate display
5
4
7
10
6
12
13
14
3
16
1, 2
17
15
18
11
9
8

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English