Inficon XTC/3 User Manual

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XTC/3 Operating Manual
Table 3-2 Output states
Output Active Inactive
Source Shut 1 In any deposit state When leaving control states
Source Shut 2
1
Sensor Shut 1
In shutter delay or any deposit
state.
In RateWatcher Sample
Closes when leaving control states.
In RateWatcher Hold
1
Sensor Shut 2
Note 1: In XTC/3S, Sensor Shut 1 and Sensor Shut 2 outputs are used to perform the crystal
switch function if a multi-position sensor has been selected.
Stop Enter Stop Exit Stop
End of Process When entering Idle if this is last
film in the process
When Start or Reset is done
Thick Setpoint In Deposit or Time Power state,
and thickness setpoint is reached
When Start or Reset is done
When Idle is entered
Xtal Fail When active crystal fails When active crystal becomes valid.
Digital Set Crystal Fail Inhibit
Alarms On Rate Deviation error
On Shutter Delay error
When Max power reached
On Crucible Switch error
As each error is cleared and no other
error is set.
When Start or Reset is done
When Idle ramp is entered
Source in use When Source 2 is active When Source 1 is active
Final Thick Final thickness is reached When Start or Reset done
End of Film (M only) Initiate Idle state When Start or Reset done
In Layer (M only) When layer is started Enter Idle or Stop
Ion Assist Dep
(M only)
Enter any deposit state and Ion
Assist Deposit is enabled
Enter Idle ramp
Enter Stop
Xtal Switch 1
(M only)
See crystal switching
section 3.6.8
See crystal switching section 3.6.8
Xtal Switch 2
(M only)
See crystal switching
section 3.6.8
See crystal switching section 3.6.8

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English